Micropatterning of LaCoO3 thin films through a novel photosensitive sol-gel lithography technique and their magnetic properties

Abstract

This paper presents a study on the microstructure and magnetic properties of LaCoO3 (LCO) thin films, and also the micropatterning of LCO thin films using a novel photo-sensitive sol-gel lithography method. It is found that higher heat-treatment temperature can promote the healing of cracks and filling of pores, resulting in refining the grains, and improving the density of LCO film. The film treated at 850 °C has a larger nucleation energy, which makes the distribution of nucleation sites more uniform, promoting the healing of cracks and filling of pores, refining the grains, and improving the density of LCO film. LCO precursor sol, metal chelates with UV photosensitivity were synthesized by adding BzAcH photosensitizer. LCO micro-arrays with diameters of 50 μm, as well as other fine patterns with a minimum line width of about 2 μm were successfully prepared by a UV mask lithography technique. In contrast, our novel lithography method eliminates the need for photoresist, as the fine pattern is formed during the preparation of the LCO gel film, which is the advantages of our lithography method over traditional techniques.