Abstract
In this paper, I present a synthetic heterodyne microoptical interferometer consisting of a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated comb structure. The use of the comb drive actuator permits a high-speed movement of the grating, and therefore provides both a wide modulation frequency and a wide frequency response. A synthetic heterodyne technique was arranged to interrogate the output signal from the interferometer. The experimental results indicate that the use of the proposed microoptical interferometer provides a suitable solution for signal modulation and optical measurement in microscale applications.
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