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https://doi.org/10.1109/68.826923
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Cite Journal: IEEE Photonics Technology Letters |  Publication Date: Mar 1, 2000 |
 Citations: 19 |
Affiliation: University of Twente
A fabrication technique by KOH etching for very thin free standing plane parallel silicon bridges in a [111] silicon wafer is presented. The applications of such a stress free slab as an evanescent optical waveguide sensor of unusually high sensitivity are discussed.
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