Abstract

We report work on a new type of ultrasonic transducers, Micromachined Ultrasonic Air-Transducers, which offer a very promising alternative to piezo-electric transducers thanks to micromachining technology. Experiments show that very high frequency signals (11 MHz) can be emitted and detected in air using MUTs. Theoretical explanation for the behavior of MUTs is proposed. It agrees well with experimental results. Optimization will eventually lead to exciting applications of MUTs in medical imaging and non destructive evaluation.

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