Abstract
A group of piezoresistive silicon cantilever paddles have been fabricated, each of which consists of a paddle square which is attached by two cantilever arms, and a piezoresistive sensor on the root surface of each arm. The process involves a combination of wet and dry etching techniques. The fabricated cantilever paddles are long and wide with a paddle square of . The measured sensitivity of the cantilever devices is , which is in good agreement with the values predicted by our derived formula. These cantilever paddles have potential application in flow sensors.
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