Micromachined piezoelectric sensor with radial polarization for enhancing underwater acoustic measurement

Abstract

This work presents an underwater acoustic sensor featuring a radial polarized piezoelectric diaphragm, which aims to work in d33 mode to enhance its performance. For the sake of accomplishing the in-plane polarization, interdigital electrodes based on semi-circular ring patterns are designed on both sides and aligned along the thickness direction of the diaphragm. Effects of electrode parameters on the polarization orientation are numerically analyzed by the conversion relationship between different coordinates. Using the Kirchhoff plate theory and Rayleigh-Ritz method, a mathematical model is developed to investigate the dynamic properties of the sensor. The results indicate that the output voltages increase with the increase of the electrode inner radius, width, and spacing but decrease with the increase of the diaphragm thickness and radius. Sensor prototypes are fabricated by the microelectromechanical system (MEMS) technology in a clean room and characterized by impedance spectrums. An underwater testing system is established to conduct the experimental verification, whose results are in good accord with those of mathematical modeling. The sensor output voltage has fine linearity with the underwater acoustic pressure and achieves a flat frequency response. Moreover, the sensor has a sensitivity of −172.7 dB (Ref. 1 V/μPa) superior to the reported devices in the same categories. This work provides significant guidance for modeling radial field piezoelectric diaphragms and designing more efficient piezoelectric microsensors, which have a fine application prospect in underwater acoustic measurement.