Micromachined methane sensor based on low resolution spectral modulation of IR absorption radiation

Abstract

We present a new methane sensor based on infrared absorption at 3.3 μm. We have designed a modulable interferencial filter to achieve sufficient selectivity and to eliminate drift and changes on transmission of optical elements or IR light source emission. This microoptical device is fabricated using materials and processes available from silicon technology, thus assuring low production cost.