Abstract
A liquid-junction Ag/AgCl reference electrode was fabricated using microfabrication techniques. It employed a novel thin-film Ag/AgCl structure which functioned normally even in a solution saturated with KCl. The container for the internal electrolyte solution and the liquid junction were formed by anisotropically etching a silicon substrate. A pin-hole junction and a combination of the pin-hole and a cellulose-acetate-plug junctions were tested. Although the electrode with the former junction showed constant drift of the potential to the positive side, the electrode with the latter junction could maintain a potential level within ±1 mV for several h. No dependence on pH and KCl concentration was observed for the latter type, which was also applied to pH measurement in combination with a commercial pH glass electrode.
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