Abstract

In this study, we present a composite plate composed of an aluminum nitride thin film and an epitaxial cubic silicon carbide layer has the remarkable capability to enable Lamb wave resonators with a high series resonance frequency (f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</sub> ) and a high quality factor (Q) simultaneously. The epitaxial cubic silicon carbide layer not only provides the Lamb wave resonator with a low acoustic loss layer to boost the Q's but also enhances the electromechanical couplings of the high-order Lamb wave modes in the composite plate. Specifically, a micromachined acoustic resonator utilizing the third quasi-symmetric (QS <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sub> ) Lamb wave mode exhibits a Q of 5510 at 2.92 GHz, resulting in the highest f <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">s</sub> ·Q product, 1.61×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> Hz, among suspended piezoelectric thin film resonators to date.

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