Abstract
In this work, micromachining and planar processing have been used to produce gas sensing devices with lower power consumption at lower cost. The small size brings new advantages for chemical selectivity as well: multi-element arrays whose time-varying signals can be interpreted using pattern recognition methods. The device platform is a `microhotplate,' consisting of a built-in heater, thermometer, and electrodes to probe the sensing films. Microhotplates are fabricated using CMOS-compatible technologies, enabling on-chip circuitry for multiplexing and signal amplification.© (1999) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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