Abstract
In the analysis of the effects of temperature on the performance of microgyroscopes, it is found that the resonant frequency of the microgyroscope decreases linearly as the temperature increases, and the quality factor changes drastically at low temperatures. Moreover, the zero bias changes greatly with temperature variations. To reduce the temperature effects on the microgyroscope, temperature compensation-control methods are proposed. In the first place, a BP (Back Propagation) neural network and polynomial fitting are utilized for building the temperature model of the microgyroscope. Considering the simplicity and real-time requirements, piecewise polynomial fitting is applied in the temperature compensation system. Then, an integral-separated PID (Proportion Integration Differentiation) control algorithm is adopted in the temperature control system, which can stabilize the temperature inside the microgyrocope in pursuing its optimal performance. Experimental results reveal that the combination of microgyroscope temperature compensation and control methods is both realizable and effective in a miniaturized microgyroscope prototype.
Highlights
In recent years, the silicon microgyroscope has been used as a kind of inertial device for measuring the angular velocity of an object’s motion [1,2,3]
The precision and stability of microgyroscopes are prone to be affected by its material of construction, manufacturing technology and other factors such as the temperature of the ambient environment, which could cause the serious drawbacks of low precision and even errors
In [4], the temperature error mechanism of gyroscope caused by Brownian noise was analyzed in detail; the Brownian noise is engendered by gas molecule collisions and the viscous elastic effects of the supporting structure
Summary
The silicon microgyroscope has been used as a kind of inertial device for measuring the angular velocity of an object’s motion [1,2,3]. As is known, it has the merits of small volume, light weight, high reliability and low cost, and it is easy for digitization and intellectualization and suitable for mass production. Owing to the expansion and centralization in material dimension over temperature, the stiffness of the silicon microgyroscope will change with temperature variation. In [5,6], the temperature error mechanisms of the tuning type and the angular vibrating types of microgyroscopes were analyzed in terms of systematic Brownian noise,
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