Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS)

Abstract

Abstract : This report presents research and development of new micromachining techniques and fabrication technologies for the construction of plastic MEMS devices. Plastic MEMS are of major importance in the implementation of miniature chemical reaction systems, such as DNA diagnostic, bacteriophage, and other bio-assays chips. Further, because of their low temperature construction, plastic MEMS devices can be integrated with conventional electronic circuits easily and inexpensively. Three main technology directions were conducted. First, technology developments for implementing plastic microsystems using both surface and bulk micromachining techniques were investigated. Surface micromachining techniques include deposition of thin and thick polymer films using vacuum and spin-casting techniques. Bulk micromachining of plastics is used for creating a viable technology for system substrates. Bulk micromachining techniques include injection molding, embossing, casting, bonding and lamination. Secondly, the integration of surface and bulk micromachining technologies leads to a robust technology for creating complete plastic microsystems. The third development direction was in the implementation of the aforementioned developed plastic micromachining technologies as several demonstration devices including microactuators, microvalves, a micropump, a microdevice for polymerase chain reactions (PCR), a capillary electrophoresis (CE) microdevice for DNA separations, and devices for patterning protein doped conductive polymers using laminar flows.