Abstract
The recent progress of manufacturing folded waveguide slow wave structures using deep reactive ion etching (DRIE) technology and UV-LIGA, and the main fabrication process are briefly presented with an emphasis on fabrication of the prototypical W band serpentine trench. With the optimal fabrication parameters, the W band folded waveguide slow wave structure with the beam tunnel is fabricated. In this paper, we also report a two-step UV-LIGA to fabricate the W band serpentine trench.
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