Abstract
An integrated circuit-compatible process has been demonstrated for microfabricating arrays of scanning tunneling microscopes on silicon wafers. Each microfabricated scanning tunneling microscope (STM) incorporates a novel three-dimensional thin-film piezoelectric actuator which is capable of scanning the STM tip laterally over the sample surface and following surface topography. The actuator is in the form of a cantilever bimorph constructed from alternating layers of multiple metallic electrodes, dielectric films, and piezoelectric zinc oxide films. Each device is designed to scan a region 0.1×1 μm with low voltage drive, with a maximum vertical deflection of 15 μm, which simplifies sample approach. The dimensions of the device are 1000×200×8 μm. Operation of the device has been demonstrated by imaging graphite with atomic resolution. The piezoelectric actuator in this device is itself a significant contribution to the field of microactuators, with many non-STM applications.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
