Abstract
This study describes our newly fabricated resonant thermal sensors based on vanadium oxide and investigates the temperature dependences of their resonant frequencies and Q factor. The deposited vanadium oxide thin films comprise 55% VO2 and 45% V2O5. The resonant frequency of the fabricated vanadium oxide resonators linearly varies with temperature, and the value of temperature coefficient of the resonant frequency is −1308 ppm/K in the range of 20–100°C. The averaged Q factor in this range was 540. The temperature and thermal resolution of the vanadium oxide resonator are estimated as 1.69 mKWHz and 4.3 nW/√Hz, respectively, which are higher than those of a Si resonator having similar dimensions and under similar conditions.
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