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Abstract
Abstract The microfabricated surface plasmon sensor is a hybrid system that integrates optical, mechanical and electronic components. The sensor contains elements that are common to numerous electro-optical systems, creating a miniature optical bench. The microsystem elements include a single-mode optical fiber, a graded index collimating lens, a scanning rotating micro-mirror, a cavity filled with index matching fluid, and a position sensitive photodiode. The elements are both laterally and vertically aligned using multi-substrate bonding and positive component-to-component alignment.
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