Abstract
We present a lithographically manufactured chip with niobium thin-film pancake coils, and a washerlike structure above this coil for focusing flux. Due to a wide range of coupling coefficients, various samples can be investigated in flip-chip or on-chip configuration, with the aim of evaluating the superconducting current-phase relation. With this, structures with dimensions in the order of 10 μm were coupled to the resonance circuit with coupling coefficients from 10−3 up to 0.9. Resonance frequencies in the 10 MHz range and quality factors of about 500 were obtained with external capacitors. Furthermore, the chip is designed to facilitate the manufacture of superconducting qubits in the center of the coil. This offers the possibility of combining on one chip novel technologies for fabricating superconducting qubits along with high-quality tank circuits for studying the qubits.
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