Abstract
Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complexstructures, devices and systems on the scale of micrometers.Initially micromachining techniques were borrowed directly fromthe integrated circuit (IC) industry, but now many uniqueMEMS-specific micromachining processes are being developed. InMEMS, a wide variety of transduction mechanisms can be used to convert real-world signals from one form of energy to another,thereby enabling many different microsensors, microactuatorsand microsystems. Despite only partial standardization and amaturing MEMS CAD technology foundation, complex andsophisticated MEMS are being produced. The integration of ICswith MEMS can improve performance, but at the price of higherdevelopment costs, greater complexity and a longer developmenttime. A growing appreciation for the potential impact of MEMShas prompted many efforts to commercialize a wide variety ofnovel MEMS products. In addition, MEMS are well suited for theneeds of space exploration and thus will play an increasinglylarge role in future missions to the space station, Mars andbeyond.
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