Microelectromechanical devices driven by thermosalient effects

Abstract

The state-of-the-art microelectromechanical systems (MEMSs) technology faces challenges in meeting the requirements of the next decade regarding improved performance, functionality, and power consumption, which can be addressed by resorting to new actuating materials. Dynamic molecular single crystals have been explored as actuating elements; however, difficulties with control over the geometry and fabrication of these materials has limited their scalability and application. Here, we present dynamic molecular crystals driven by thermosalient phase transitions as alternative materials in MEMSs technology with swift and amplified mechanical response. This work employs a thermally deposited stable polycrystalline thin film of L-pyroglutamic acid to fabricate a prototypical thermosalient organic crystal-MEMS (TS-OC-MEMS). The organic thin film undergoes a reversible and cyclable martensitic phase transition that drives the deformation. The TS-OC-MEMSs provide a reliable and scalable solution to utilize dynamic molecular crystals in robust applications and circumvent the challenges that have long stifled their application as actuating materials.