Micro-ECM of 3D micro-electrode for efficiently processing 3D micro-structure

Abstract

Applying 3D micro-electrodes in micro-electrical discharge machining (micro-EDM) can process a 3D micro-structure with up and down reciprocating machining method. However, this method has some shortcomings, such as the formation of ridges on 3D micro-structure surface and a relatively low processing efficiency. To resolve these shortcomings, this study fabricated 3D micro-electrode and applied it in micro-electrochemical machining (micro-ECM). Based on the principle of electrolytic polishing, the ridges on the 3D micro-structure surface were basically eliminated and make the ridges have little influence on the 3D micro-structure surface. Moreover, with a feeding speed of 50 μm/min, it takes only 8 min to process a 3D micro-structure (360-μm depth) by using micro-ECM. With the improvement of surface quality and processing efficiency, it is believed that this study could improve the application possibility of 3D micro-electrodes in industrial fields.