Abstract
We demonstrate the fabrication of three-dimensional (3D) hollow microstructures embedded in photostructurable glass by a nonlinear multiphoton absorption process using a femtosecond (fs) laser. Fs laser direct writing followed by annealing and successive wet etching in dilute hydrofluoric (HF) acid solution resulted in the rapid manufacturing of microchips with 3-D hollow microstructures for the dynamic observation of living microorganisms in fresh water. The embedded microchannel structure enables us to analyze the continuous motion of Euglena gracilis and Dinoflagellate . Such microchips, referred to as nano-aquariums realize the efficient and highly functional observation of microorganisms.
Published Version
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