Abstract

The compact chip carrier named MCC has been developed for high density chip level packaging. The MCC realizes the smallest possible hermetic chip package by introducing full surface flip-chip interconnections, thin-film process technology, built-in termination resistors, and a thermal expansion matched ceramic substrate. The structure of the MCC and the thin-film process technology for its fabrication are reported.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>

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