Abstract
Ti50Ni47Cu3 films were prepared using magnetron sputtering deposition, and their martensitictransformation and mechanical properties were characterized. Free-standing TiNiCufilms showed an intrinsic two-way shape memory effect which is attributed toa composition gradient through the film thickness. Different types of TiNiCumicroactuators, including microtweezers and microcages, have been successfullyfabricated which employ this two-way shape memory effect for operation. Uponheating/cooling, the microtweezers showed both horizontal and vertical displacement dueto combined shape memory and thermal effects. The microcage actuators couldbe opened/closed through substrate heating with a maximum temperature of90 °C, or by electrical heating with a power less than 5 mW and a maximum frequency of100–300 Hz. Issues related to the fabrication and applications, such as stability and beambending after release, have been addressed.
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