Abstract
This paper describes a new hybrid micro-machining method, which combines wire electro discharge grinding technology with one pulse electro discharge, to fabricate micro-spherical probes and micro-spherical cavities. The results show that a burnished micro-spherical probe with about 40 µm diameter could be formed instantaneously with the hybrid machining process, which is not available in the conventional micro-machining method. The deviation in diameter and roundness tolerances of micro-spherical probes is about 1 µm and 3 µm, respectively. Compared with conventional electro discharge machining, the surface roughness of the spherical probe is much smaller than a discharge crater. It will be possible to achieve more accurate three-dimensional measurements with the micro-spherical probe attached to the coordinate measuring machine in the future.
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