Abstract
Abstract The application of a micro-sphere plate (MSP) to secondary electron detection in environmental scanning electron microscopy (ESEM) and possible ways of using the MSP is discussed and experimental measurements made of significant MSP parameters. In the preferred solution the MSP plays the role of a semi-permeable wall separating a standard scintillator detector from the low vacuum chamber. The gas conductance measured for an MSP of dimensions 1.4 mm thick and 12 mm diameter was 0.03 dm 3 /s, which is sufficiently low and suitable for this application. A survey of the MSP multiplication coefficient for various gases and vapours revealed that the coefficient increases at increasing gas pressures and has a value of the order of 10 2 –10 3 in the pressure range 10 −2 –10 −1 mbar. The results suggest that the MSP may be suitable as a secondary electron detector for ESEM.
Published Version
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