Abstract
Micro/nanomechanical resonators have been designed and fabricated with the aim to be used as distributed mass sensors for in situ measurement of the thickness of ultra-thin layers. First, we present a comparative study of three kinds of oscillating devices (cantilever, bridge and quad beam). The quad beam design has been selected for fabrication because it combines high sensitivity and good electrical response. The complete fabrication process of the device is based on electron beam lithography, lift-off and reactive ion etching. The frequency response has been characterized by means of electrical excitation and capacitive read-out.
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