Abstract
This paper reports the design, fabrication and measurement techniques for a set of low-loss slotted waveguides. The waveguides are fabricated based on a micro metal additive manufacturing technology. They were fabricated layer by layer in one piece without the need of post-fabrication assembly. As examples, straight waveguides in WR-3.4 (220-330°GHz) and WR-2.2 (330-500°GHz) bands were fabricated and tested. Measurement results show the insertion loss per unit length is 0.0615-0.122°dB/mm and 0.116-0.281°dB/mm, respectively.
Highlights
Compared with planar transmission lines, waveguides are widely used in millimeter wave/THz systems due to their low insertion loss and high-power capacity
We report some 220-500°GHz rectangular waveguides designed and fabricated based on the Micro metal additive manufacturing (M-MAM) technology using a similar 5-layer topology like the SU-8 waveguides in [3]
The vector network analyser (VNA) was calibrated using the proposed methods in four steps: Step 1, to calibrate the loss in the fixture, the VNA was connected with the ports (P3 and P4) and a one-step through calibration was used to remove the losses from the fixture; Step 2, the VNA was connected with the ports (P1 and P2) to obtain the IL of the waveguide
Summary
Compared with planar transmission lines, waveguides are widely used in millimeter wave/THz systems due to their low insertion loss and high-power capacity. Different from the processes mentioned above, the approach can in theory fabricate components monolithically with pure copper, because no post processing (such as plating of silver on the SU-8 or Silicon) is needed Both mechanical and thermal performance of the devices are improved, and the extra losses introduced by misalignment between the layers can be avoided. The measurement results show that an insertion loss of 0.06-0.157°dB/mm in WR-3.4 band and 0.115-0.28°dB/mm in WR-2.2 band can be achieved, suggesting that it is feasible to fabricate low-loss rectangular waveguide devices in these frequency ranges by using M-MAM technology
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