Abstract
Preface. Chapter 1 - Introduction to micro mechanical transducers. Chapter 2 - Basic mechanics of beam and diaphragm structures. Chapter 3 - Air damping. Chapter 4 - Electrostatic driving and capacitive sensing. Chapter 5 - Piezoresistive sensing. Chapter 6 - Piezoresistive pressure transducers. Chapter 7 - Piezoresistive accelerometers. Chapter 8 - Capacitive pressure transducers and accelerometers. Chapter 9 - Resonant sensors and vibratory gyroscopes. Subject Index.
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