Abstract

Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS (Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro extended Rayleigh wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments.

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