Abstract

This paper demonstrates that 18 μm deep surface understating with a tolerance of 4.5 μm and a roughness Ra=0.4 μm can be produced to the required accuracy by electrochemical die-sinking if configured appropriately.Theoretical analysis shows that the bottom profile error can be presented as a superposition of the errors of surface alignment (non-parallel bottom) and shape (non-flat bottom). In this case, the alignment error accounts for a greater part of the size tolerance (3 μm out of 4.5 μm). This is why the attainment of desired accuracy revolves around the development, analysis, and assessment of ways to reduce this error.

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