Micro disk resonator with on-disk piezoelectric thin film transducers for integrated MEMS ubiquitous applications

Abstract

The integration of micro electromechanical systems (MEMS) with ICs is one of the key technologies for MEMS ubiquitous applications and commercialization. This paper therefore presents a high sensitive micro disk resonator with on-disk piezoelectric PZT thin film as the transducer for better impedance matching to CMOS, and for disk self-actuation self-sensing at low actuation voltage and low power consumption. By optimizing the size, location of the PZT-electrode stacks, and the layout of the silicon disk to compress energy dissipation, dramatically improved quality-factor (Q-factor) was achieved both in air (Q=1319) and under reduced pressure (Q=5028 at the pressure of 300Pa).