Micro channel forming with ultra thin metallic foil by cold isostatic pressing

Abstract

The objective of this study is to establish the limit of the metal forming process in terms of size and accuracy. In the present investigation, micro channel forming with ultra thin metallic foil by the sheet metal forming process was studied. In order to examine the fabrication limit of the process, both the channel size needed to be as small as possible and the sheet thickness to be as thin as possible. Copper foil 1.0 μm thick was made into 5.6 μm wide and 3.2 μm deep channels. The shapes of the channels were straight line, concentric circle, cross, and other curved shapes. Forming was done by cold isostatic pressing. Single crystal silicon wafer was used as the die material, and die grooves were made by micro machining techniques. The die, metallic foil, and plasticine as the pressure-transmitting medium were vacuum packed in a bag made of multilayered film. The forming was conducted with a cold hydrostatic press where the forming pressure was 240 MPa. The formed channels were examined in terms of their dimensions and surface qualities. Based on the examinations, channel formability was also discussed.