Micro Channel Device composed by Dry Film Resist

Abstract

Micro particles path through in a concave channel and are trapped at a through hole in the filter structure. In the experiments, the deionized (DI) water is dropped on a micro 3D-filtering system constructed by a dry film resist (DFR) pattern. The filtering system is composed by an inlet hole of micro liquid drop, a micro channel, a micro filter and an outlet channel. In the result, the micro particles condensed and trapped at the different position in various shape patterns. The flowing and trapping of micro particles in a micro filtering device has been recognized as one important factor in functional micro device manufacturing. The construction of 3D-structure under acting Laplace force is accomplished without the structure destruction. The force acting on the micro particles and DFR structure is controlled by adjusting surface energy of methanol solution. We can control and predict the micro filtering system by designing micro pattern arrangement.