Micro chamber for cellar analysis integrated with negligible dead volume sample injector

Abstract

A micro chamber integrated with an extremely low dead volume sample injector for real-time monitoring of living cell was developed. By means of the combination of isotropic etching and deep trench etching using CCP–RIE and ICP–RIE, the sample injector with negligible dead volume of less than 0.05 nl is realized. Using fabricated devices, the reproducible sample injection of the order of 1 nl was obtained. Biological cell culture of rat mast cell was also performed in the fabricated micro chamber.