Integrated micro chamber for living cell analysis with negligible dead volume sample injector

M Kanai,Y Fujiyama,A Yamayoshi,H Abe,H Nakanishi,S Shoji,A Murakami,T Munaka,D Uchida

doi:10.1109/sensor.2003.1215309

Integrated micro chamber for living cell analysis with negligible dead volume sample injector

M Kanai, Y Fujiyama + Show 7 more

https://doi.org/10.1109/sensor.2003.1215309

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Publication Date: Nov 9, 2015

Citations: 2

Affiliation: Shimadzu (Japan), Kyoto Institute of Technology

#Deep Trench Etching #Prototype Device + Show 8 more

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Abstract

We develop the micro chamber for real-time monitoring of living cell. It is integrated with an extremely low dead volume sample injector. The chamber was fabricated by the combination of isotropic etching and deep trench etching using CCP-RIE and ICP-RIE. The reproducible sample injection of the order of 1 nL is performed. Biological cell culture of HeLa is also demonstrated in a prototype device.

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