Abstract
Micro- and integrated-optical devices in glass and polymers are integrated increasingly in microsystems. Design and simulation of such optical elements are well developed. Ray tracing and a manifold of propagation and field calculation methods are available. First steps to CAD have been done. Using Ag+−Na+ ion exchange in special optical glasses, one-and two-dimensional refractive index profiles of definite shape have been realezed. Good quality one-dimensional profiles can be used for micro-cylindrical lens fabrication (N.A.≥0.5), two dimensional index gradients have been used for phase grating fabrication. E-beam direct writing with variable shaped beam has been used successfully to realize different types of surface corrugated microoptical components. Embossing in polymers is a well suitable method for fabrication of passive integrated-optical devices and of micro-optical elements as refractive and diffractive lenses and lens arrays, corrugated prisms and gratings. Applications of glass and polymer microoptical devices have been demonstrated for laser diode collimation, in miniaturized interferometers, beam deflectors and modulators.
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