Refracted Near-Field Characterization Of Ion Exchanged Glass Waveguides And Device Simulation

Abstract

The refractive index profile of single mode integrated optical strip waveguides, fabricated by a field assisted ion exchange process in glass are determined by the refracted near-field technique. Two-dimensional refractive index profiles are directly measured with a precision of Δn = 0.001 and a spatial resolution of 0.8 μm. This technique is nondestructive, and requires minimal sample preparation. Quantitative data of the index profile are obtained, which are the basis for an efficient control of ion exchange processes and a simulation of integrated optical devices. The index profile is scanned automatically yielding the two dimensional index distribution. By the effective index method the depth coordinate of the two-dimensional profile is eliminated and the effective index profile is used for BPM-simulations of devices.