Abstract
The principles and applications of X-ray fluorescence spectrometry and X-ray emission in the electron microprobe analysis and low energy electron induced X-ray spectrometry were described. With the help of soft X-ray spectra, arising from the valence bands, the different aluminum and titanium compounds of precipitates in steel can be investigated. The precipitates were isolated by an galvanostatic electrolysis. For speciation of aluminum the Kβlines in the X-ray fluorescence spectrum were investigated. The composition of aluminum oxide and -nitride in precipitates of special steel qualities can be determined. In the case of the speciation of titanium a direct electron bombardment of the sample is used to generate soft-X-rays. By investigating the L-lines of titanium different species like titaniumcarbide,-nitride or sulphide can be distinguished.
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