Abstract
This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03 mm.
Highlights
Fourier Transform Interferometry (FTI) is a powerful technique for non-contact surface profilometry that offers high resolution using only one or two images [1]
Others have acknowledged the problem of error propagation and have developed a variety of solutions to handle point errors when unwrapping from a single reference [6,7]
A new technique is proposed that allows the specification of an arbitrary reference fringe. This Method of Multiple References (MoMR) removes the limitations associated with fixed-fringe referencing, enabling imaging of multiple discrete surfaces
Summary
Fourier Transform Interferometry (FTI) is a powerful technique for non-contact surface profilometry that offers high resolution using only one or two images [1]. Others have acknowledged the problem of error propagation and have developed a variety of solutions to handle point errors when unwrapping from a single reference [6,7]. These techniques are unable to handle discontinuities that extend the entire length of the surface. A new technique is proposed that allows the specification of an arbitrary reference fringe This Method of Multiple References (MoMR) removes the limitations associated with fixed-fringe referencing, enabling imaging of multiple discrete surfaces,.
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