Abstract
A method for holographic femtosecond laser parallel processing is proposed, which can suppress the interference of zero-order light effectively and improve the energy utilization rate. In order to blaze the target pattern to the peak position of zero-order interference, a phase-only hologram containing a digital blazed grating is designed and generated, and the energy of the target pattern can be increased by 3.793 times in theory. In addition, by subsequently increasing the phase of the divergent spherical wave, the focal plane of the target pattern and the plane of the multiorder diffraction beam resulting from the pixelated structure of the spatial light modulator (SLM) can be separated. Both a high-pass filter and aperture are used to simultaneously eliminate the influences of zero-order light and multiorder interferential patterns. A system based on the phase-only SLM (with resolution of 1920×1080) is set up to validate the proposed method. The experimental results indicate that the proposed method can achieve high-quality holographic femtosecond laser parallel processing with a significantly improved energy utilization rate.
Highlights
Femtosecond laser processing is a powerful technique which enables microfabrication in transparent materials
Dynamic spatial light modulator (SLM) holograms based on pixel structure still face many problems for achieve the target diffraction pattern, as the zero-order diffracted light and multiorder image reproduction caused by the characteristics of the SLM pixel structure have a large impact on the target image quality
The results indicate that this method can improve the energy utilization rate, and, by using the high-pass filter and aperture, separate the focus focal plane of the target pattern and the plane of the multiorder diffraction beam resulting from the SLM pixelated structure
Summary
Femtosecond laser processing is a powerful technique which enables microfabrication in transparent materials. The advantages of femtosecond laser processing include high-spatial resolution, reduced thermal destruction, and widespread application for various materials.[1] it is a drawback that such a device fabrication requires a huge number of processing points. Femtosecond laser holographic parallel processing based on SLM has attracted broad attention in research.[2,3,4,5,6] dynamic SLM holograms based on pixel structure still face many problems for achieve the target diffraction pattern, as the zero-order diffracted light and multiorder image reproduction caused by the characteristics of the SLM pixel structure have a large impact on the target image quality. A great number of studies aiming at addressing these issues was carried out by researchers in the holographic display fields all around the world.[7,8,9,10,11] For example, Palima and Daria[7] designed a CGH which can produce a desired phase and a corrective phase, and the beam with the corrective phase can destructively interfere with the zero-order beam
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