Metalorganic vapor phase epitaxy growth and properties of GaAs/AlGaAs and InGaAs/GaAs quantum well structures on (111)A GaAs substrates

Abstract

We review the recent advances in the fabrication and properties of GaAs/AlGaAs and InGaAs/GaAs quantum well (QW) structures grown on (111)A GaAs substrates by atmospheric pressure metalorganic vapor phase epitaxy (MOVPE). We show that a 25-period GaAs/AlGaAs multi-QW (MQW) structure was fabricated with good crystal quality, high photoluminescence (PL) emission intensity and monolayer (ML) interfacial roughness. A PL full width at half maximum (FWHM) of 10.5meV was achieved for a 25-period MQW with a well width of 44Å. This is the narrowest linewidth reported to date for any similar structures grown on (111)A or B substrates by any growth technique. We also report the properties of an InGaAs/GaAs single quantum well structure grown on (111)A GaAs. For this structure, the PL FWHM value was 9.1meV, corresponding to a 1ML interfacial roughness for a well width of 41Å. This is the first demonstration of an InGaAs/GaAs quantum well structure grown on (111)A or (111)B GaAs by MOVPE.