Abstract

This chapter describes the two typical examples of joining performance of structural and functional materials from the point of view of metallurgical characterization. At first, friction stir processing (FSP) is an effective grain refinement technique. FSP was conducted in the topmost 1-mm-thick layer of the steel welds, achieving increase of its fatigue strength and toughness. The FSP provided, for example, ultrafine equiaxial ferrite grains covered with thin layer cementite in a certain condition, based on characterization using transmission electron microscope. Second, a thin Ti-based self-formed barrier (SFB) formed by annealing a Cu(Ti) alloy film deposited on dielectrics at elevated temperature is one of the solutions to achieve low resistance and high reliability of Cu interconnects in ultra-large-scale integration devices. Identification of SFB was conducted using the electron diffraction, X-ray photoelectron spectroscopy, and Rutherford backscattering spectrometry techniques. That identification indicates that SFB consists of mainly amorphous Ti oxides, and its growth is concluded to be controlled by a thermally activated process.

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