Abstract
A fast and accurate microsizing method is introduced and analyzed for metallic protuberances on flat substrates. It is based on the measurement of the minima angular positions of the S-polarized far field scattering patterns at normal incidence. The proposed method has been theoretically and experimentally checked for both cylindrical and spherical metallic protuberances on conducting flat substrates. The excellent agreement between theory and experiment proves the efficiency of the method. We also comment on the application of this method for other protuberance geometries and different substrates other than metallic.
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