Abstract
A thin-film Bragg–Fresnel lens (BFL) was developed for diffractive focusing of hard x-rays into submicron to nanometer spots for scanning x-ray spectromicroscopy. The lens is made of metal-layer Fresnel zones deposited on an x-ray reflective substrate. The use of a high-density lens structure reduces the thickness of the lens and simplifies the fabrication process. Linear and elliptical lenses made of a 200-nm-thick Au film were fabricated using e-beam lithography and a metal deposition process. The focusing capabilities of the Au layer BFLs were demonstrated at the Advanced Photon Source.
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