Abstract
For developing coating materials, the fluorides of scandium, lanthanum, strontium, barium, magnesium and aluminum were produced from their oxides and chlorides by means of exposure to chlorine trifluoride gas at temperatures between room temperature and 700°C. The metal chlorides could be easily fluorinated even at room temperature, while the metal oxides required temperatures higher than 300?C. After the heating in ambient hydrogen at 1100°C, the fluorides of lanthanum and barium showed very low weight losses at 1100°C, although the weights of the other fluorides significantly decreased. These materials may work as protective films against corrosive and high temperature environments, particularly when using the chlorine trifluoride gas.
Highlights
Chemical vapor deposition (CVD) can produce various high quality and functional material films [1]
When the scandium oxide was exposed to the chlorine trifluoride gas at room temperature, the F/Sc value was still near 1
In order to develop materials for protecting surfaces from high temperature and corrosive gas environments, such as chlorine trifluoride gas, metal fluorides having high melting points were synthesized from metal oxides and chlorides using chlorine trifluoride gas
Summary
Chemical vapor deposition (CVD) can produce various high quality and functional material films [1]. The unnecessary films formed near the substrate often emit many small particles that cause serious film defects, such as hillocks and stacking faults. Such films are removed by means of a cleaning process using highly reactive gases, such as hydrogen chloride, chlorine trifluoride, fluorocarbons and nitrogen fluoride along with thermal and/or plasma assistance. For the silicon carbide CVD reactor, the cleaning process has been very difficult except when using chlorine trifluoride gas [3]-[14], because of the significantly stable chemical nature of silicon carbide [2]
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Surface Engineered Materials and Advanced Technology
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
