Abstract
Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) technologies have enabled novel ultracompact sensors. Ranging from various low-power sensors, energy harvesters, to advanced system-in-package (SiP) technology, MEMS and NEMS devices and fabrication technology have proven themselves as indispensable and enabling technologies for realization of the self-sustained wireless sensor nodes. This paper reports the state of the art progress which indicates bright future of self-sustained wireless sensor nodes.
Published Version
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