MEMS-Based Active Sliders With Multi-Layered Composite PZT Thin Films in Hard Disk Drives

Abstract

This paper describes MEMS-based active sliders with micro-actuators. The proposal active slider uses PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. The design procedure for the active slider is discussed. In addition, novel multi-layered composite PZT thin film micro-actuators, which are very important functional micro-devices, are studied, and it is shown that the recently developed PZT thin films have better piezoelectric characteristics than not only conventional sol-gel derived PZT thin films but also sputtered PZT thin films. The micro-machining process for the active slider is also developed and the pico-size active slider is fabricated. The technical issues related to the fabrication of MEMS-based active sliders are discussed.