複合多層PZT薄膜マイクロアクチュエータの開発(マイクロメカトロニクス,IIP2004 情報・知能・精密機器部門講演会)

Abstract

This paper describes the development of novel PZT thin films. The feature for novel PZT thin films is that double-layered composite PZT thin films which laminate sputtered PZT thin films and sol-gel PZT thin films. The novel PZT thin films are found to have the higher (111) preferred orientation than not only sol-gel PZT thin films but also sputtered PZT thin films. In addition, it is found that composite PZT thin films, which feature is that the sol-gel derived PZT thin films are deposited on the sputtered PZT thin films, shows better characteristics.