基于MEMS工艺的高增益低副瓣太赫兹波纹喇叭天线设计

Abstract

本文提出了一种基于微电子机械系统(MEMS)工艺的高增益低副瓣太赫兹波纹喇叭天线设计方法。利用三维全波有限元电磁仿真软件Ansys HFSS，对角锥喇叭的波纹开槽尺寸和条数进行参数分析和优化设计，获得了在275 GHz至580 GHz的有效带宽内(回波损耗小于10 dB)增益超过8 dB和副瓣电平小于-13 dB的太赫兹波纹喇叭天线。结果表明波纹开槽可有效提高太赫兹喇叭天线增益并压低副瓣，同时也说明MEMS工艺可有效用于太赫兹功能器件设计。 A novel high gain and low side-lobe terahertz (THz) corrugated horn antenna based on Micro-electro-me- chanical-systems (MEMS) technology is proposed. Properties of the antenna for different corrugated groove sizes and numbers are investigated and optimized by using three-dimensional (3D) electromagnetic full-wave finite element method (FEM) simulation software package Ansys High Frequency Structure Simulator (HFSS). The gain and side-lobe of the THz antenna can be designed greater than 8 dB and less than -13 dB, respectively in the band wide for 10 dB return loss from 275 GHz to 580 GHz. The results show that the corrugated groove can effectively improve the gain and depress the side-lobe of the horn antenna at the THz frequency range. Meantime, the THz functional devices could be effectively fabricated using MEMS technology.