Abstract
A novel flexible Microelectromechanical System(MEMS) anti-drag skin was proposed based on the drag reduction with lingering-micro-bubble generated by electrolysis,and the fabrication of flexible MEMS anti-drag skin was designed.The MEMS skin composed of a flexible substrate layer,a metal electrode layer and a micro-well-array layer was designed,and two process routes based on MEMS were developed for the skin fabrication.Then,the polydimethylsiloxane(PDMS) and SU-8 were used to fabricate the micro-well-array layer,respectively.Several key steps in these processes were studied and a specimen was fabricated using SU-8.The specimen has a thickness of 90 μm and contains 6.25×104 cylindrical wells with a depth of 50 μm and a diameter of 40 μm per square centimeter.It can be bent and attached on a Φ28 mm cylinder without damage.Results demonstrate that the MEMS is feasible to realize the anti-drag skin and the flexible MEMS anti-drag skin offers a novel way to reduce the skin friction of vehicles in water.
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